FIB Damage Reduction Technique in TEM Membrane Using Triple Beam System
نویسندگان
چکیده
منابع مشابه
TEM Sample Preparation and FIB-Induced Damage
Joachim Mayer, Lucille A. Giannuzzi, Takeo Kamino, and Joseph Michael preparation can be applied to almost any material type—hard, soft, or combinations thereof. The number of materials for which successful TEM sample preparation with FIBs has been documented certainly reaches several hundred and spans from hard matter such as metals, ceramics, and composites to soft matter including polymers, ...
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Despite the significant advances in the transmission electron microscope (TEM), such as application of aberration correction and monochromation [1], sample preparation is still one of the most critical steps determining the quality, and precision of the results. The important challenge here is to prepare samples that are thin enough for electron transparency, free from any surface damage and al...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2006
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927606063537